Metrology
Metrology
MarSurf UD 130 综合性轮廓和表面测量站
ZH
MarSurf UD 130
Mahr replace with the MarSurf UD 130 the successful MarSurf UD 120 and closed the gap between the high end solution MarSurf LD 130/LD 260 and the standard combination measuring station MarSurf XCR 20 with two drive units.
The technical specification of the MarSurf UD 130 is far superior to that of the MarSurf UD 120: in particular, the measuring and positioning speeds have reduced the measuring time for each workpiece.
  • 技术数据

测量速度(文本)
0.1 mm/s to 5 mm/s;
for roughness measurements
0.1 mm/s to 0.5 mm/s are recommended
扫描长度末尾(X 方向)
130 mm
分辨率
2 nm
扫描长度开始(X 方向)
0.1 mm
定位速度(文本)
0.1 mm/s to 30 mm/s
输入
Standard probe LP-D 14-10-2/60°
测量范围 mm

10 mm (100 mm probe arm)
20 mm (200 mm probe arm)

轮廓分辨率
2 nm
扫描长度(文本)
0.1 mm to 130 mm
测量力 (N)
1 mN to 30 mN, software-adjustable